Automated Probe Systems - Micromanipulator

Microscope & Optics

300X—3000X
Manual – Programmed Movement
Large gantry to accommodate most optical options

Stage Area

200mm – 300mm chuck standard.
Dark & Dry Environment available
Most planar chucks on the market
Allows for high speed testing needs

Platen

One piece assembly
Cut to allow easy sample access
Allows for magnetic or vacuum
based positioners

Empowering Technology

Perpetual Focus Technology (PFT)
True Cal
Infinity Focus
True Guard
OS Freedom (automated systems)
Sub-Micron

Testing

Hot & Cold (frost free)
Backside & Double Sided.
High-power, DC, high frequency, & mmW.
High-speed signal acquisition.
Test wafers, boards, pieces, packaged
parts, & individual die, all at temperature.

Quality Considerations

Systems built from 20+ pieces with
dampening material at each joint.
Built up with accuracy and stability in
mind

chamber with 300mm wafer

200mm W/ controller & NetProbe 7

remote control

Customizing Options

Thermal Chambers
Thermal Chucks
Laser Ready
Electro-magnet capable

Fine positioning stages
Double side probing/viewing
RF & DC Positioners
Wafer chucks & board holders

Application		Why choose automated probe systems from Micromanipulator?
Wafer & Individual die probing	Up to 300mm	Supports most optical microscope options. Allows motorized and manual positioning of positioners. Allows motorized and manual positioning of wafers under the optics. Supports above and below ambient, frost free probing with ease. Temperature testing (200mm = –65° to 400°C) (300mm = -55° to 300°C). Supports all wafer level tests – DC, RF, mmW, High Power, and more. Works well with vacuum collection and customer die holding needs.
Thermal Probing	Hot & Cold for full wafers/ pieces, packaged chips, and board mounted devices	The highest value hot/cold automated probe station on the market – nothing else even comes close! Has the most versatile automation pick and choose the items you need to automate and save on automation that isn’t necessary. Temperature ramp rates are FAST !!! Integrated systems to make upgrading to thermal a simple and lab ready solution.
Automation	Custom Motorized Movement	Allows for some or all of the axis’s to become motorized, programmable, and adjustable. Stage, Microscope, Positioners, and Temperature all can be designed to have motorized adjustment and remote programmability. NetProbe7 software takes over the programming needs & makes automation even more efficient. Also, Our NetProbe 7 software is designed so you wouldn’t pay costly annual licenses to keep your system operational.

Micromanipulator Probe Systems are the most flexible automated systems on the market. They allow us to consider each aspect of your automation, adding and removing motorized movement as needed to best perform your
testing. Never sacrificing speed with accuracy, and; always ensuring a solution for you new tests. Micromanipulators automated probe systems is the standard that all motorized/automated probe stations are based on. So
don’t be left behind with systems that are not as well built for long term usage contact us today and we will configure the best system for your testing needs.

L series Controller and NetProbe 7

Multiport versions available

P300L with Netprobe 7

Custom board holders available

The most stable thermal chuck
options

Micromanipulator’s model H1000 thermal chuck series is built with a cooled radiator under the chuck to protect the system and user from excessive heating.

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