Vibrometer Probe Stations │ Probe Stations Optimized for vibrometer testing
Inspired by the rapid further development of microelectromechanical systems and MEMS, Micromanipulator presents this highly innovative product line of microscope-based measurement systems that validate dynamics and topography of microsystems reliably with utmost precision whether in the Kilohertz range, at several Megahertz or up to the Gigahertz range. These stations are engineered to determine transfer functions, use unique all-in-one instruments for both the static and dynamic 3D characterization of microsystems, measure and see through Si encapsulations and integrate your test-setup.
Features
- All-in-one microscope-based measurement workstation for microstructures
- True real-time response measurement up to 2.5 (6) GHz (no post-processing required)
- Unparalleled sub-picometer displacement resolution
- Fast measurement and visualization of deflection shapes and topography
- Straightforward operation with results that are intuitive and easy to interpret
- Automated system that integrates well for production (full probe station compatibility)
Technical Capabilities
- Real-time vibration analysis Real-time characterization of out-of-plane (OOP) vibrations by laser Doppler vibrometry to frequencies up to 2.5 GHz and with a displacement resolution down to the (sub-)picometer level
- Planar motion analysis Characterization and live-mode1 visualization of in-plane motion by stroboscopic video microscopy to frequencies up to 2.5 MHz and with a displacement resolution in the nanometer range
- Surface topography analysis Surface topography measurement by scanning white-light interferometry provides a vertical resolution down to sub-nanometer and a horizontal resolution in the sub-micrometer range